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Characterization and optimization of the LPCVD silicon oxynitride process, using the design of experiments method.

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1991
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Characterization and optimization of the LPCVD silicon oxynitride process, using the design of experiments method.
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Journal de Physique II 1991; 1(Suppl C2):47-61
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https://rivm.openrepository.com/handle/10029/632919
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